JPH0522866Y2 - - Google Patents
Info
- Publication number
- JPH0522866Y2 JPH0522866Y2 JP5817886U JP5817886U JPH0522866Y2 JP H0522866 Y2 JPH0522866 Y2 JP H0522866Y2 JP 5817886 U JP5817886 U JP 5817886U JP 5817886 U JP5817886 U JP 5817886U JP H0522866 Y2 JPH0522866 Y2 JP H0522866Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- lines
- force
- chopper
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 description 17
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5817886U JPH0522866Y2 (en]) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5817886U JPH0522866Y2 (en]) | 1986-04-17 | 1986-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170571U JPS62170571U (en]) | 1987-10-29 |
| JPH0522866Y2 true JPH0522866Y2 (en]) | 1993-06-11 |
Family
ID=30888530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5817886U Expired - Lifetime JPH0522866Y2 (en]) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522866Y2 (en]) |
-
1986
- 1986-04-17 JP JP5817886U patent/JPH0522866Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62170571U (en]) | 1987-10-29 |
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